Foundations Of MEMS
Use attributes for filter ! | |
Google books | books.google.com |
---|---|
Originally published | August 26, 2005 |
Authors | Chang Liu |
Date of Reg. | |
Date of Upd. | |
ID | 3089160 |
About Foundations Of MEMS
For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. . . .