Foundations of MEMS photograph

Foundations Of MEMS

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Originally published August 26, 2005
Authors Chang Liu
Date of Reg.
Date of Upd.
ID3089160
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About Foundations Of MEMS


For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. . . .

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