Fundamentals Of Microfabrication
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| Google books | books.google.com |
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| Originally published | September 26, 1997 |
| Authors | Marc J Madou |
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| ID | 2082765 |
About Fundamentals Of Microfabrication
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. . . .