Handbook Of Sputter Deposition Technology
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| Google books | books.google.com |
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| Originally published | 1992 |
| Authors | Kiyotaka Wasa |
| Editors | Kiyotaka Wasa |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2242183 |
About Handbook Of Sputter Deposition Technology
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. . . .