Spectroscopic Ellipsometry And Reflectometry: . . .
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| Google books | books.google.com |
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| Originally published | March 18, 1999 |
| Authors | Harland G. Tompkins |
| William A. McGahan | |
| Date of Reg. | |
| Date of Upd. | |
| ID | 2075877 |
About Spectroscopic Ellipsometry And Reflectometry: . . .
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. . . .