ULSI Technology
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Originally published | 1996 |
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ID | 2056783 |
About ULSI Technology
The first textbook to be published for this subject area, this text is aimed at senior level and graduate courses in ULSI technology. This text follows the tradition of Sze's highly successful pioneering text on VLSI technology, and is updated with the latest advances in the field of microelectronic chip fabrication. . . .